Proximity gettering design of silicon wafers using silicon hydride and hydrocarbon mixture molecular ion implantation technique

Publication date: 15 November 2021Source: Materials Science in Semiconductor Processing, Volume 135Author(s): Ryo Hirose, Takeshi Kadono, Ayumi Onaka-Masada, Ryosuke Okuyama, Koji Kobayashi, Akihiro Suzuki, Yoshihiro Koga, Kazunari Kurita
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research