Understanding of Si3N4-H3PO4 Reaction Chemistry for the Control of Si3N4 Dissolution Kinetics

Publication date: Available online 9 July 2021Source: Journal of Industrial and Engineering ChemistryAuthor(s): Taegun Park, Changjin Son, Taehyeon Kim, Sangwoo Lim

Source: Journal of Industrial and Engineering Chemistry - July 9, 2021 Category: Chemistry Source Type: research