Synthesis of δ-Ta2O5 heteroepitaxial films on YVO4 (100) substrates

Publication date: 15 November 2021Source: Materials Science in Semiconductor Processing, Volume 135Author(s): Yong Le, Xiaochen Ma, Di Wang, Hongdi Xiao, Caina Luan, Jin Ma
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research