Influence of growth parameters on microstructures and electrical properties of InxAl1−xN thin films using sputtering

Publication date: 10 December 2021Source: Journal of Alloys and Compounds, Volume 885Author(s): Wenqing Song, Tao Li, Lei Zhang, Wenhui Zhu, Liancheng Wang

Source: Journal of Alloys and Compounds - July 3, 2021 Category: Chemistry Source Type: research