Growth and characterization of Ta-doped Ga2O3 films deposited by magnetron sputtering

Publication date: 1 November 2021Source: Materials Science in Semiconductor Processing, Volume 134Author(s): Yi Shang, Ke Tang, Zhuorui Chen, Zhiluo Zhang, Jie Deng, Yan Hu, Keyun Gu, Meng Cao, Linjun Wang, Jian Huang
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research