Triboelectric nanogenerator-based anodic bonding of silicon to glass with an intermediate aluminum layer

Publication date: Available online 25 June 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Yuxing Lin, Honglie Shen, Xiangyu Chen, Yufang Li, Yajun Xu, Binbin Xu

Source: Sensors and Actuators A: Physical - June 26, 2021 Category: Physics Source Type: research