Highly sensitive thick diaphragm-based surface acoustic wave pressure sensor

Publication date: Available online 24 June 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Maria Muzamil Memon, Shuliang Pan, Jiang Wan, Tao Wang, Wanli Zhang

Source: Sensors and Actuators A: Physical - June 25, 2021 Category: Physics Source Type: research