Radio-frequency magnetron co-sputtered Ge-Sb-Te phase change thin films

Publication date: 1 October 2021Source: Journal of Non-Crystalline Solids, Volume 569Author(s): Marek Bouška, Virginie Nazabal, Jan Gutwirth, Tomáš Halenkovič, Petr Němec

Source: Journal of Non Crystalline Solids - June 25, 2021 Category: Chemistry Source Type: research