Numerical investigation on material removal mechanism in elliptical vibration cutting of single-crystal silicon

Publication date: 1 November 2021Source: Materials Science in Semiconductor Processing, Volume 134Author(s): Changlin Liu, Jianguo Zhang, Junjie Zhang, Jianning Chu, Xiao Chen, Junfeng Xiao, Jianfeng Xu
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research