Improving anti-humidity property of In2O3 based NO2 sensor by fluorocarbon plasma treatment

Publication date: 1 October 2021Source: Sensors and Actuators B: Chemical, Volume 344Author(s): Bingsheng Du, Tianjiao Qi, Jinshan Li, Yong He, Xi Yang

Source: Sensors and Actuators B: Chemical - June 19, 2021 Category: Chemistry Source Type: research