Study of surface exfoliation induced by hydrogen implantation and annealing in GaSb (100) substrates

Publication date: 1 November 2021Source: Materials Science in Semiconductor Processing, Volume 134Author(s): Ravi Pathak, U. Dadwal, A.K. Kapoor, M. Vallet, A. Claverie, R. Singh
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research