Packaging of Semiconductor Thermoelectric Energy Generators with In-Plane Thermocouples and Isolation Cavities

Publication date: Available online 17 June 2021Source: Sensors and Actuators A: PhysicalAuthor(s): S.M. Yang, Y.S. Hsu

Source: Sensors and Actuators A: Physical - June 17, 2021 Category: Physics Source Type: research