Ultraviolet, visible and near infrared photoresponse of SiO2/Si/SiO2 multilayer system into a MOS capacitor

Publication date: 1 November 2021Source: Materials Science in Semiconductor Processing, Volume 134Author(s): K.E. González-Flores, J.L. Frieiro, P. Horley, S.A. Pérez-García, L. Palacios-Huerta, M. Moreno, J. López-Vidrier, S. Hernández, B. Garrido, A. Morales-Sánchez
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research