Utilizing mechanical adhesion force as a high contact force in a mems relay

Publication date: Available online 8 June 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Su-Bon Kim, Hyun-Woo Min, Yong-Bok Lee, Su-Hyun Kim, Pan-Kyu Choi, Jun-Bo Yoon

Source: Sensors and Actuators A: Physical - June 9, 2021 Category: Physics Source Type: research