Design of a flexure-based parallel XY micropositioning stage with millimeter workspace and high bandwidth

Publication date: Available online 8 June 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Tingwei Wang, Yingzi Li, Yingxu Zhang, Rui Lin, Jianqiang Qian, Zhipeng Dou

Source: Sensors and Actuators A: Physical - June 9, 2021 Category: Physics Source Type: research