Blister suppression in the co+ molecule implanted soi substrates with ultrathin buried oxides

Publication date: Available online 2 June 2021Source: Materials Today CommunicationsAuthor(s): V.P. Popov, F.V. Tikhonenko, V.A. Antonov, S.M. Tarkov, A.K. Gutakovskii, V.I. Vdovin, S.G. Simakin, K.V. Rudenko

Source: Materials Today Communications - June 3, 2021 Category: Materials Science Source Type: research