Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: Interplay between film characteristics and corrosion protection of stainless steel

Publication date: Available online 29 May 2021Source: Journal of Materials Research and TechnologyAuthor(s): Sebastian M.J. Beer, Diane Samelor, Alsayed Abdel Aal, Johannes Etzkorn, Detlef Rogalla, Asiya E. Turgambaeva, Jerome Esvan, Aleksander Kostka, Constantin Vahlas, Anjana Devi
Source: Journal of Materials Research and Technology - Category: Materials Science Source Type: research