A Temperature Compensated Biaxial eFM Accelerometer in Epi-Seal Process

Publication date: Available online 27 May 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Seungyong Shin, Hyun-Keun Kwon, Gabrielle D. Vukasin, Thomas W. Kenny, Farrokh Ayazi

Source: Sensors and Actuators A: Physical - May 27, 2021 Category: Physics Source Type: research