Influence of diamond wire saw slicing parameters on (010) lattice plane beta-gallium oxide single crystal wafer

Publication date: October 2021Source: Materials Science in Semiconductor Processing, Volume 133Author(s): Pengcheng Gao, Baimei Tan, Fan Yang, Hui Li, Na Bian, Xiaoqin Sun, Mengrui Liu, Ru Wang
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research