Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate

Publication date: July–August 2021Source: Journal of Materials Research and Technology, Volume 13Author(s): Babacar Diallo, Konstantina C. Topka, Maxime Puyo, Charlotte Lebesgue, Cécile Genevois, Raphael Laloo, Diane Samelor, Hélène Lecoq, Mathieu Allix, Hugues Vergnes, François Senocq, Pierre Florian, Vincent Sarou-Kanian, Thierry Sauvage, Marie-Joelle Menu, Brigitte Caussat, Viviane Turq, Constantin Vahlas, Nadia Pellerin
Source: Journal of Materials Research and Technology - Category: Materials Science Source Type: research