A MEMS-based Electromagnetic Membrane Actuator Utilizing Bonded Magnets with Large Displacement

Publication date: Available online 19 May 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Chao Qi, Dong Han, Tadahiko Shinshi

Source: Sensors and Actuators A: Physical - May 21, 2021 Category: Physics Source Type: research