Measurement system for wide-range flow evaluation and thermal characterization of MEMS-based thermoresistive flow-rate sensors

Publication date: Available online 15 May 2021Source: Sensors and Actuators A: PhysicalAuthor(s): N.A. Djuzhev, V.T. Ryabov, G.D. Demin, M.A. Makhiboroda, I.D. Evsikov, M.M. Pozdnyakov, V.A. Bespalov

Source: Sensors and Actuators A: Physical - May 16, 2021 Category: Physics Source Type: research