High-throughput synthesis of oxidation-resistant Nb–Si based alloy thin film by magnetron co-sputtering

Publication date: Available online 14 May 2021Source: Progress in Natural Science: Materials InternationalAuthor(s): Chen Sun, Wei Jiang, Meifeng Li, Jiangbo Sha, Chungen Zhou
Source: Progress in Natural Science: Materials International - Category: Materials Science Source Type: research