Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer

Publication date: September 2021Source: Journal of Physics and Chemistry of Solids, Volume 156Author(s): Shota Nunomura, Isao Sakata, Aiko Sato, Mickaël Lozac'h, Tatsuya Misawa, Naho Itagaki, Masaharu Shiratani

Source: Journal of Physics and Chemistry of Solids - May 14, 2021 Category: Physics Source Type: research