Solution-processed molybdenum oxide films by low-temperature annealing for improved silicon surface passivation

Publication date: September 2021Source: Materials Science in Semiconductor Processing, Volume 132Author(s): Jun Chen, Can Liu, Shilong Xu, Peng Wang, Xiaoyu Ge, Bingquan Han, Yizhe Zhang, Minghua Wang, Xiaoping Wu, Lingbo Xu, Ping Lin, Xiaorong Huang, Xuegong Yu, Can Cui
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research