Deposition-rate dependent kinetic roughening for nanoscale sputter-deposited Cu films on Si surface

Publication date: Available online 12 May 2021Source: Journal of Physics and Chemistry of SolidsAuthor(s): S. Boscarino, M. Censabella, G. Piccitto, M.G. Grimaldi, F. Ruffino
Source: Journal of Physics and Chemistry of Solids - Category: Physics Source Type: research