An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods

Publication date: Available online 11 May 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Xingang Luan, Shaomin Gu, QiQi Zhang, Laifei Cheng, Ralf Riedel

Source: Sensors and Actuators A: Physical - May 12, 2021 Category: Physics Source Type: research