One-step fabrication of fine surfaces via femtosecond laser on sliced SiC

Publication date: September 2021Source: Materials Science in Semiconductor Processing, Volume 132Author(s): Gaopan Chen, Jianguo Li, Haimei Luo, Yan Zhou, Qingfa Peng, Xiaozhu Xie, Guoshun Pan
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research