Reprint of: A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine

Publication date: Available online 10 May 2021Source: Progress in Materials ScienceAuthor(s): Hashim Alhmoud, Daniel Brodoceanu, Roey Elnathan, Tobias Kraus, Nicolas H. Voelcker
Source: Progress in Materials Science - Category: Materials Science Source Type: research