Distinguishing various influences on the electrical properties of thin-barrier AlGaN/GaN heterojunctions with in-situ SiNx caps

Publication date: September 2021Source: Materials Science in Semiconductor Processing, Volume 132Author(s): Jiaqi He, Wei-Chih Cheng, Yang Jiang, Mengya Fan, Guangnan Zhou, Gaiying Yang, Lingli Jiang, Xiang Wang, Zhanxia Wu, Qing Wang, Hongyu Yu
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research