Close-spaced evaporation of CaGe2 films for scalable GeH film formation

Publication date: September 2021Source: Materials Science in Semiconductor Processing, Volume 132Author(s): Kosuke O. Hara, Shin Kunieda, Junji Yamanaka, Keisuke Arimoto, Mai Itoh, Masashi Kurosawa
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research