Passivating antireflection coating of crystalline siliconusing i/n a-Si:H/SiN trilayer

Publication date: Available online 7 May 2021Source: Journal of Physics and Chemistry of SolidsAuthor(s): Shota Nunomura, Isao Sakata, Aiko Sato, Mickaël Lozac’h, Tatsuya Misawa, Naho Itagaki, Masaharu Shiratani

Source: Journal of Physics and Chemistry of Solids - May 7, 2021 Category: Physics Source Type: research