Comparison Study of Bending and Three-wave Vibration Modes for Micro Ultrasonic Motors

Publication date: Available online 4 May 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Eric Tan Kai Chiang, Tomoaki Mashimo

Source: Sensors and Actuators A: Physical - May 5, 2021 Category: Physics Source Type: research