Photochemical Fate of Sulfonium Photoacid Generator Cations under Photolithography Relevant UV Irradiation

Publication date: Available online 30 April 2021Source: Journal of Photochemistry and Photobiology A: ChemistryAuthor(s): Xi-Zhi Niu, Richard Pepel, Rodrigo Paniego, Jim Field, Jon Chorover, Leif Abrell, A. Eduardo Sáez, Reyes Sierra-Alvarez

Source: Journal of Photochemistry and Photobiology A: Chemistry - April 30, 2021 Category: Chemistry Source Type: research