Damage Profile Evolution Model Based on the Boltzmann Transport Equation for Silicon Micromachining with the Focused Helium Ion Beam

Publication date: Available online 27 April 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Qi Li, XiaoHui Lin, Chibin Zhang, Qianhuang Chen, Tianyang Shao, Yan Xing

Source: Sensors and Actuators A: Physical - April 28, 2021 Category: Physics Source Type: research