A Leakage Compensated Charge Control Driving Circuit with Sensor Feedback for a Comb Drive Actuator

Publication date: Available online 28 April 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Pieter Bauwens, Sander Cornelis, Jan Doutreloigne

Source: Sensors and Actuators A: Physical - April 28, 2021 Category: Physics Source Type: research