Effect of off-axis substrate angles on β-Ga2O3 thin films and solar-blind ultraviolet photodetectors grown on sapphire by MOCVD

Publication date: 15 August 2021Source: Materials Science in Semiconductor Processing, Volume 131Author(s): Yongjian Ma, Wenbo Tang, Tiwei Chen, Li Zhang, Tao He, Xin Zhou, Xing Wei, Xuguang Deng, Houqiang Fu, Kun Xu, Xiaodong Zhang, Baoshun Zhang
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research