A method of using Si L-edge for O/Si and N/Si quantitative ratio analysis by electron energy loss spectroscopy (EELS)

Publication date: Available online 20 April 2021Source: MicronAuthor(s): Yun-Yu Wang, Sook Fun Chan, Qiang Jin, Kent Zhuang, Jae Kyu Choi
Source: Micron - Category: Biology Source Type: research
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