Machine-learning micropattern manufacturing

Publication date: June 2021Source: Nano Today, Volume 38Author(s): Si Wang, Ziao Shen, Zhenyu Shen, Yuanjun Dong, Yanran Li, Yuxin Cao, Yanmei Zhang, Shengshi Guo, Jianwei Shuai, Yun Yang, Changjian Lin, Xun Chen, Xingcai Zhang, Qiaoling Huang
Source: Nano Today - Category: Nanotechnology Source Type: research