Molecular dynamics simulation of AFM tip-based hot scratching of nanocrystalline GaAs

Publication date: 1 August 2021Source: Materials Science in Semiconductor Processing, Volume 130Author(s): Pengfei Fan, Saurav Goel, Xichun Luo, Yongda Yan, Yanquan Geng, Yang He, Yuzhang Wang
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research