Investigation on surface smoothing of silicon-on-insulator with gas phase hydrogen chloride etching

Publication date: 1 August 2021Source: Materials Science in Semiconductor Processing, Volume 130Author(s): Nan Gao, Yuan Gao, Meng Chen, Hongtao Xu, Zhongying Xue, Xing Wei
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research