Incorporation of Zn ions on high dielectric HfO2 thin films by spray pyrolysis and fabrication of Al/Zn@HfO2/n-Si Schottky barrier diodes

Publication date: Available online 2 April 2021Source: Sensors and Actuators A: PhysicalAuthor(s): P. Harishsenthil, J. Chandrasekaran, R. Marnadu, V. Balasubramani

Source: Sensors and Actuators A: Physical - April 3, 2021 Category: Physics Source Type: research