A Flexible High Quality-factor Bulk Acoustic Resonator Enabled with transferred single-crystal Piezoelectric thin film for Sensing Applications

Publication date: Available online 31 March 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Yanmei Xue, Changjian Zhou, Xiu Yin Zhang, Mansun Chan
Source: Sensors and Actuators A: Physical - Category: Physics Source Type: research
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