On the ultimate resolution of As2S3-based inorganic resists

Publication date: 1 July 2021Source: Journal of Non-Crystalline Solids, Volume 563Author(s): S.I. Nesterov, M.E. Boyko, M. Krbal, A.V. Kolobov
Source: Journal of Non Crystalline Solids - Category: Chemistry Source Type: research
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