Magnesium-related shallow donor centers in silicon

Publication date: 1 August 2021Source: Materials Science in Semiconductor Processing, Volume 130Author(s): S.G. Pavlov, Yu.A. Astrov, L.М. Portsel, V.B. Shuman, А.N. Lodygin, N.V. Abrosimov, H.-W. Hübers
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research