The relationship between structural and electrical properties of the post-deposition annealed Er2O3/n-Si hetero-structures

Publication date: 1 August 2021Source: Materials Science in Semiconductor Processing, Volume 130Author(s): Aysegul Kahraman, Berk Morkoc, Ercan Yilmaz
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research