A 1×20 MEMS Mirror Array with Large Scan Angle and Low Driving Voltage for Optical Wavelength-Selective Switches

Publication date: Available online 16 March 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Yan An, Boqian Sun, Peng Wang, Lei Xiao, Huan Liu, Huikai Xie

Source: Sensors and Actuators A: Physical - March 17, 2021 Category: Physics Source Type: research