Design and realization of sculpture-shaped ciliary MEMS vector hydrophone

Publication date: Available online 10 March 2021Source: Sensors and Actuators A: PhysicalAuthor(s): Peng Chen, Guojun Zhang, Xi Yang, SongXiang Ji, XiaoQi Liang, Ting Lv, XiaoYong Zhang, Shan Zhu, ZhenZhen Shang, WenDong Zhang

Source: Sensors and Actuators A: Physical - March 11, 2021 Category: Physics Source Type: research