Improving structural, optical, and electrical properties of μc-Si:H using non-uniform hydrogen dilution treatment on RF-PECVD prepared layers

Publication date: July 2021Source: Materials Science in Semiconductor Processing, Volume 129Author(s): Zahra Dorostghol, Abdolnabi Kosarian

Source: Materials Science in Semiconductor Processing - March 6, 2021 Category: Materials Science Source Type: research