Study on subsurface damage mechanism of gallium nitride in nano-grinding

Publication date: 15 June 2021Source: Materials Science in Semiconductor Processing, Volume 128Author(s): Chaoyue Zhang, Zhigang Dong, Song Yuan, Xiaoguang Guo, Renke Kang, Dongming Guo
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research